Plasma deposition of low-dielectric-constant fluorinated amorphous carbon
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.371119
Reference33 articles.
1. Particle-Packing Phenomena and Their Application in Materials Processing
2. Synthesis and properties of fluorinated polyimides from novel 2,2'-bis(fluoroalkoxy)benzidines
3. Deposition of amorphous fluoropolymer thin films by thermolysis of Teflon amorphous fluoropolymer
4. Thermal polymerization of bis(benzocyclobutene) monomers containing .alpha.,.beta.-disubstituted ethenes
5. Organic and Inorganic Spin-On Polymers for Low-Dielectric-Constant Applications
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