Optimal Pressure and Temperature Conditions for Deposition of FOTS Thin Films Suitable for Anti-Stiction Layers
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Published:2013-04-05
Issue:4
Volume:51
Page:259-264
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ISSN:1738-8228
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Container-title:Korean Journal of Metals and Materials
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language:
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Short-container-title:Korean J. Met. Mater.
Author:
Lee Caroline Sunyong,Park Jin-Goo,Kim Dong-Chan,Kwon Tae-Young,Kim Hyuk-Min,Lim Hyun-Woo,Roh Ji-Young
Publisher
The Korean Institute of Metals and Materials
Subject
Metals and Alloys,Surfaces, Coatings and Films,Modelling and Simulation,Electronic, Optical and Magnetic Materials