Characterization of Low-k/Cu Damascene Structures Using Monoenergetic Positron Beams-Reference-Cited by-同舟云学术

Characterization of Low-k/Cu Damascene Structures Using Monoenergetic Positron Beams

Published:2009-12-07 Issue:12 Volume:48 Page:120222
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Uedono Akira,Inoue Naoya,Hayashi Yoshihiro,Eguchi Kazuhiro,Nakamura Tomoji,Hirose Yukinori,Yoshimaru Masaki,Oshima Nagayasu,Ohdaira Toshiyuki,Suzuki Ryoichi

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Reference14 articles.

1. Multilevel interconnections for ULSI and GSI era

2. Low dielectric constant materials for microelectronics

3. Doppler broadening positron annihilation spectroscopy: A technique for measuring open-volume defects in silsesquioxane spin-on glass films

4. Determination of Pore Size in Mesoporous Thin Films from the Annihilation Lifetime of Positronium

5. Nanoporous structure of methyl-silsesquioxane films using monoenergetic positron beams

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