Micromachining of Multilayer Thin Films for High-Speed Humidity Sensor Fabrication
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
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2. Titanium Dioxide Nanoparticle Humidity Microsensors Integrated with Circuitry on-a-Chip;Sensors;2014-03-03
3. A Printable Humidity Sensing Material Based on Conductive Polymer and Nanoparticles Composites;Japanese Journal of Applied Physics;2013-05-01
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