Titanium Dioxide Nanoparticle Humidity Microsensors Integrated with Circuitry on-a-Chip-Reference-Cited by-同舟云学术

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Titanium Dioxide Nanoparticle Humidity Microsensors Integrated with Circuitry on-a-Chip

Published:2014-03-03 Issue:3 Volume:14 Page:4177-4188
ISSN:1424-8220
Container-title:Sensors
language:en
Short-container-title:Sensors

Author:

Hu Yu-Chih,Dai Ching-Liang,Hsu Cheng-Chih

Publisher

MDPI AG

Subject

Electrical and Electronic Engineering,Biochemistry,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry

Link

http://www.mdpi.com/1424-8220/14/3/4177/pdf

Reference29 articles.

1. Microsensors MEMS and Smart Devices;Gardner,2001

2. Capacitive humidity sensors based on the dielectrophoretically manipulated ZnO nanorods;Chen;Sens. Actuators A,2012

3. Capacitive humidity sensors based on a newly designed interdigitated electrode structure;Kim;Microsyst. Technol.,2012

4. Response improvement of integrated humidity sensors using a micropump;Lee;Electron. Mater. Lett.,2010

5. Micromachining of Multilayer Thin Films for High-Speed Humidity Sensor Fabrication

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