Composition Control of Lead Zirconate Titanate Thin Films in Electron Cyclotron Resonance Plasma Enhanced Chemical Vapor Deposition System
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by 8 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Characterization of Pb(Zr, Ti)O[sub 3] thin films fabricated by plasma enhanced chemical vapor deposition on Ir-based electrodes;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2002
2. Metallorganic Chemical Vapor Deposition of Pb(Zr, Ti)O[sub 3] Films Using a Single Mixture of Metallorganic Precursors;Journal of The Electrochemical Society;2001
3. Effects of Electrodes on the Electric Properties of Pb(Zr,Ti)O3Films Deposited by Electron Cyclotron Resonance Plasma Enhanced Chemical Vapor Deposition;Japanese Journal of Applied Physics;2000-03-15
4. Microstructure and electric properties of the PZT thin films fabricated by ECR PECVD: the effects of an interfacial layer and rapid thermal annealing;Materials Chemistry and Physics;1998-04
5. Formation of a Lead Zirconate Titanate (PZT)/Pt Interfacial Layer and Structural Changes in the Pt/Ti/SiO2/Si Substrate during the Deposition of PZT Thin Film by Electron Cyclotron Resonance Plasma-Enhanced Chemical Vapor Deposition;Japanese Journal of Applied Physics;1997-07-15
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