Characterization of Pb(Zr, Ti)O[sub 3] thin films fabricated by plasma enhanced chemical vapor deposition on Ir-based electrodes-Reference-Cited by-同舟云学术

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Characterization of Pb(Zr, Ti)O[sub 3] thin films fabricated by plasma enhanced chemical vapor deposition on Ir-based electrodes

Published:2002 Issue:6 Volume:20 Page:1939
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:J. Vac. Sci. Technol. A

Author:

Lee Hee-Chul,Lee Won-Jong

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Cited by 13 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Strongly Enhanced Piezoelectric Response in Lead Zirconate Titanate Films with Vertically Aligned Columnar Grains;ACS Applied Materials & Interfaces;2017-03-08

2. Piezoelectric MEMS Energy Harvesters;Micro Energy Harvesting;2015-05-08

3. Process dependence of the piezoelectric response of membrane actuators based on Pb(Zr0.45Ti0.55)O3 thin films;Thin Solid Films;2014-04

4. Asymmetric electrical properties in Pt/Ba0.5Sr0.5Ti0.99Co0.01O3/Nb-doped SrTiO3 capacitors;Physica B: Condensed Matter;2011-09

5. Use of simple annealing processes to prepare anisotropic iridium and iridium dioxide nanostructures;CrystEngComm;2011

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