Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by
33 articles.
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1. High Resolution Surface Modification of WS2 via Plasma Oxidation and Electron Beam Reduction;Microscopy and Microanalysis;2024-07
2. Review of metal-containing resists in electron beam lithography: perspectives for extreme ultraviolet patterning;Journal of Micro/Nanopatterning, Materials, and Metrology;2022-06-02
3. Glass in Integrated Photonics;Springer Handbook of Glass;2019
4. UV and E-Beam Direct Patterning of Photosensitive CSD Films;Chemical Solution Deposition of Functional Oxide Thin Films;2013
5. Photopatternable inorganic hardmask;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2010-11