Sub-Nanometer Resolution Ultrasonic Motor for 300 mm Wafer Lithography Precision Stage-Reference-Cited by-同舟云学术

Sub-Nanometer Resolution Ultrasonic Motor for 300 mm Wafer Lithography Precision Stage

Published:2002-09-15 Issue:Part 1, No. 9 Volume:41 Page:5858-5863
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Egashira Yoshiya,Kosaka Kouji,Iwabuchi Tetsuya,Kosaka Tetsuya,Baba Tetsuro,Endo Taishi,Hashiguchi Hiroyuki,Harada Takashi,Nagamoto Keiichi,Watanabe Masayuki,Yamakawa Takahiro,Miyata Noboru,Moriyama Shiro,Morizono Yasuhiro,Nakada Akira,Kubota Hiroshi,Ohmi Tadahiro

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Link

http://stacks.iop.org/1347-4065/41/i=9R/a=5858/pdf

Cited by 33 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Laser-Activated Lightweight Porous Linear Actuation Micro Mechanisms through Multiscale Topology Optimization with Considering Radiation;2024-06-05

2. Multiscale Topology Optimization for Lightweight Porous Linear Actuation Micro Mechanisms with Enhanced Heat Dissipation Under Laser Activation;SSRN Electronic Journal;2024

3. Mechanical system and dynamic control in photolithography for nanoscale fabrication: A critical review;International Journal of Mechanical System Dynamics;2021-09

4. Mechanical and energetic characteristics of an energy harvesting type piezoelectric ultrasonic actuator;Mechanical Systems and Signal Processing;2019-08

5. Piezoelectric Motor Using In-Plane Orthogonal Resonance Modes of an Octagonal Plate;Actuators;2018-01-06