Author:
Kinomura Atsushi,Takai Mikio,Namba Susumu
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by
8 articles.
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1. Damage of polyimide thin films irradiated by MeV proton microbeams;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1995-09
2. Nuclear microprobe development and application to microelectronics;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1994-03
3. Damage during Microchanneling Analysis Using 400 keV Helium Ion Microprobe;Japanese Journal of Applied Physics;1992-05-15
4. Development of an automatic ion beam focusing system for a nuclear microprobe;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1991-08
5. Channeling contrast analysis of local damage distributions induced by maskless implantation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1991-04