Application of Matrix Projection Exposure Using a Liquid Crystal Display Panel to Fabricate Thick Resist Molds
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Reference20 articles.
1. Matrix Projection Exposure Using an Analogue Liquid Crystal Display Panel in Place of a Reticle
2. Improved projection-matrix-exposure using a liquid crystal display panel for printing smooth arbitrary patterns without reticles
3. Improvement of the Liquid-Crystal-Display Matrix Exposure Using an Aperture Plate for Reshaping Cell Windows
4. Arbitrary pattern fabrication with a LCD reticle-free exposure method
5. Development of reticle-free exposure method with LCD projection image
Cited by 6 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Two-layer resist process for printing thick patterns by exploiting a maskless projection exposure system using a liquid-crystal-display panel;Japanese Journal of Applied Physics;2020-03-06
2. Pattern Width Homogenization in the Field of Liquid-Crystal-Display Matrix Exposure by Adjusting Each Cell Transmittance;Journal of Photopolymer Science and Technology;2016
3. Simple maskless lithography tool with a desk-top size using a liquid-crystal-display projector;Microelectronic Engineering;2015-06
4. Projection exposure using a projector with highly minute liquid crystal display panels;SPIE Proceedings;2013-06-28
5. Fabrication of nickel micro-parts using liquid–crystal-display projection lithography and newly developed pattern transfer process;Microelectronic Engineering;2012-10
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