Matrix Projection Exposure Using an Analogue Liquid Crystal Display Panel in Place of a Reticle
Author:
Publisher
Springer Science and Business Media LLC
Subject
Atomic and Molecular Physics, and Optics
Link
http://link.springer.com/content/pdf/10.1007/s10043-007-0224-9.pdf
Reference14 articles.
1. A New Projection Exposure Method Using a Liquid Crystal Display as a Switching Matrix in Place of a Reticle
2. Development of reticle-free exposure method with LCD projection image
3. Arbitrary pattern fabrication with a LCD reticle-free exposure method
4. Maskless fabrication of light-directed oligonucleotide microarrays using a digital micromirror array
Cited by 8 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Two-layer resist process for printing thick patterns by exploiting a maskless projection exposure system using a liquid-crystal-display panel;Japanese Journal of Applied Physics;2020-03-06
2. Pattern Width Homogenization in the Field of Liquid-Crystal-Display Matrix Exposure by Adjusting Each Cell Transmittance;Journal of Photopolymer Science and Technology;2016
3. Simple maskless lithography tool with a desk-top size using a liquid-crystal-display projector;Microelectronic Engineering;2015-06
4. Fabrication of nickel micro-parts using liquid–crystal-display projection lithography and newly developed pattern transfer process;Microelectronic Engineering;2012-10
5. Novel exposure system using light-emitting diodes and an optical fiber array for printing serial numbers and code marks;Review of Scientific Instruments;2012-04
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3