Arbitrary pattern fabrication with a LCD reticle-free exposure method
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SPIE
Cited by 10 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Two-layer resist process for printing thick patterns by exploiting a maskless projection exposure system using a liquid-crystal-display panel;Japanese Journal of Applied Physics;2020-03-06
2. Pattern Width Homogenization in the Field of Liquid-Crystal-Display Matrix Exposure by Adjusting Each Cell Transmittance;Journal of Photopolymer Science and Technology;2016
3. Simple maskless lithography tool with a desk-top size using a liquid-crystal-display projector;Microelectronic Engineering;2015-06
4. Fabrication of nickel micro-parts using liquid–crystal-display projection lithography and newly developed pattern transfer process;Microelectronic Engineering;2012-10
5. Multi-Layer Thick Resist Process Using Liquid-Crystal-Display Projection Exposure and Vacuum Treatment Process;Journal of Photopolymer Science and Technology;2012
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