Modeling Microwave Resonance of Curling Probe for Density Measurements in Reactive Plasmas
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,General Engineering
Link
http://stacks.iop.org/1882-0786/4/i=6/a=066101/pdf
Reference17 articles.
1. Plasma Oscillation Method for Measurements of Absolute Electron Density in Plasma
2. Diagnostics And Control Of High-Density Etching Plasmas
3. Plasma Absorption Probe for Measuring Electron Density in an Environment Soiled with Processing Plasmas
4. Highly sensitive plasma absorption probe for measuring low-density high-pressure plasmas
5. Assignment of Axial Wavenumber in a Plasma Absorption Probe
Cited by 48 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Effect of radiofrequency bias power on transmission spectrum of flat-cutoff sensor in inductively coupled plasma;Physics of Plasmas;2024-09-01
2. Electron density measurements in low-pressure plasmas using cutoff probes and comparison with hairpin and Langmuir probes;Physics of Plasmas;2024-04-01
3. Computational Study on the Parallel Double-Curling Probe for Multi-Site Electron Density Measurement in Low-Temperature Plasma;Applied Science and Convergence Technology;2023-09-12
4. A sheath correction method for electron density measurements with the microwave resonant curling probe;Plasma Sources Science and Technology;2023-09-01
5. Development of the Tele-Measurement of Plasma Uniformity via Surface Wave Information (TUSI) Probe for Non-Invasive In-Situ Monitoring of Electron Density Uniformity in Plasma Display Fabrication Process;Sensors;2023-02-24
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3