Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by
4 articles.
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1. Platinum contamination issues in ferroelectric memories;Journal of Applied Physics;2002-09-15
2. Impact of platinum contamination on ferroelectric memories;Integrated Ferroelectrics;2001-01
3. (Ba,Sr)TiO3 Thin Films for Dram’s;Thin Film Ferroelectric Materials and Devices;1997
4. New elements in Si technology-a contamination risk?;2001 6th International Symposium on Plasma- and Process-Induced Damage (IEEE Cat. No.01TH8538)