Impact of platinum contamination on ferroelectric memories-Reference-Cited by-同舟云学术

Impact of platinum contamination on ferroelectric memories

Published:2001-01 Issue:1-4 Volume:37 Page:75-82
ISSN:1058-4587
Container-title:Integrated Ferroelectrics
language:en
Short-container-title:Integrated Ferroelectrics

Author:

Boubekeur Hocine¹,Mikolajick Thomas¹,Nagel Nicolas¹,Dehm Christine¹,Pamler Werner²,Bauer Anton³,Frey Lothar³,Ryssel Heiner³

Affiliation:

1. a Infineon Technologies, Memory Products , Balanstrasse 73, 81541, Munich, Germany

2. b Infineon Technologies, Corporate Research , Otto-Hahn-Ring 6, 81730, Munich, Germany

3. c Fraunhofer Institute of Integrated Circuit, IIS-B , Schottkystrasse 10, 91058, Erlangen, Germany

Publisher

Informa UK Limited

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials

Link

https://www.tandfonline.com/doi/pdf/10.1080/10584580108015667

Reference11 articles.

1. Bearda , T. de Gendt , S. Loewenstein , L. Knotter , M. Mertens , P. and Heyns , M. 1999.Fourth International Symposium on Ultra Clean Processing of Silicon Surfaces, 11Zuerich-Uetikon, Switzerland: Scitec Publ. Ltd.

2. Takiyama , M. Ohtsuka , S. Hayashi , S. and Tachimori , M. 1994.Extended Abstracts of the 7th International Symposium on Silicon Material Science and Technology346San Francisco

3. Effects of Copper Contamination in Silicon on Thin Oxide Breakdown

4. Effects of iron contamination in silicon on thin oxide breakdown and reliability characteristics

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