Self-Aligned Metal Double-Gate Low-Temperature Polycrystalline Silicon Thin-Film Transistors on Glass Substrate Using Back-Surface Exposure
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Reference10 articles.
1. Kink-free polycrystalline silicon double-gate elevated-channel thin-film transistors
2. A novel self-aligned double-gate TFT technology
3. Implementation and characterization of self-aligned double-gate TFT with thin channel and thick source/drain
4. A New Polysilicon CMOS Self-Aligned Double-Gate TFT Technology
5. High-Performance Short-Channel Double-Gate Low-Temperature Polysilicon Thin-Film Transistors Using Excimer Laser Crystallization
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1. Four-terminal polycrystalline-silicon vertical thin-film transistors on glass substrates;Japanese Journal of Applied Physics;2024-04-01
2. Performance of four-terminal low-temperature polycrystalline-silicon thin-film transistors and their application in CMOS inverters on glass substrates;Japanese Journal of Applied Physics;2018-01-24
3. Hydrogenation of Polycrystalline Silicon Thin‐Film Transistors;New Advances in Hydrogenation Processes - Fundamentals and Applications;2017-01-25
4. (Invited) Self-Aligned Four-Terminal Low-Temperature Polycrystalline-Silicon Thin-Film Transistors on Glass Substrate Using Continuous-Wave Laser Lateral Crystallization;ECS Transactions;2016-08-18
5. Lateral Grain Growth of Amorphous Silicon Films With Wide Thickness Range by Blue Laser Annealing and Application to High Performance Poly-Si TFTs;IEEE Electron Device Letters;2016-03
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