Electrical Properties of Ultrathin SiO$_{2}$ Layer Deposited at 50 $^{\circ}$C by Inductively Coupled Plasma-Enahnced Chemical Vapor Deposition
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,General Engineering
Link
http://stacks.iop.org/1882-0786/5/i=2/a=021103/pdf
Reference8 articles.
1. Low-Temperature Materials and Thin Film Transistors for Flexible Electronics
2. Low-temperature electron cyclotron resonance plasma-enhanced chemical-vapor deposition silicon dioxide as gate insulator for polycrystalline silicon thin-film transistors
3. Plasma-induced chemical micropatterning for cell culturing applications: a brief review
4. High quality SiO2 gate insulator suitable for poly-Si TFTs on plastic substrates employing inductively coupled plasma-chemical vapor deposition with N2O plasma treatment and excimer laser annealing
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