Optimizing oxide capping layer for tuning pore formation in silicon nanoporous membranes
Author:
Funder
Ministry of Electronics and Information technology
DST
Publisher
Springer Science and Business Media LLC
Subject
General Medicine
Link
https://link.springer.com/content/pdf/10.1007/s41683-021-00070-9.pdf
Reference21 articles.
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2. Achar BHV, Sengupta S, Bhattacharya E (2013) Fabrication of ultrathin silicon nanoporous membranes and their application in filtering industrially important biomolecules. IEEE Trans Nanotechnol 12:583–588. https://doi.org/10.1109/TNANO.2013.2262100
3. Alayo MI, Pereyra I, Carreño MNP (1998) Thick SiOxNy and SiO2 films obtained by PECVD technique at low temperatures. Thin Solid Films 332:40–45. https://doi.org/10.1016/S0040-6090(98)01021-9
4. Bhadra P, Sengupta S, Ratchagar NP, Achar B, Chadha A, Bhattacharya E (2016) Selective transportation of charged ZnO nanoparticles and microorganism dialysis through silicon nanoporous membranes. J Memb Sci 503:16–24. https://doi.org/10.1016/J.MEMSCI.2015.12.058
5. Fang DZ, Striemer CC, Gaborski TR, McGrath JL, Fauchet PM (2010) Methods for controlling the pore properties of ultra-thin nanocrystalline silicon membranes. J Phys Condens Matter 22:454134. https://doi.org/10.1088/0953-8984/22/45/454134
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