Application of Plasma Jet Crystallization Technique to Fabrication of Thin-Film Transistor-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Application of Plasma Jet Crystallization Technique to Fabrication of Thin-Film Transistor

Published:2004-12-24 Issue:3 Volume:44 Page:L108-L110
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Higashi Seiichiro,Kaku Hirotaka,Murakami Hideki,Miyazaki Seiichi,Watakabe Hajime,Ando Nobuyuki,Sameshima Toshiyuki

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Cited by 31 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Investigations of the sheath in a dual-frequency capacitively coupled rf discharge by optically trapped microparticles;Physics of Plasmas;2021-08

2. Direct observation of ultra-rapid solid phase crystallization of amorphous silicon films irradiated by micro-thermal-plasma-jet;Materials Science in Semiconductor Processing;2021-01

3. Progress and perspectives in dry processes for emerging multidisciplinary applications: how can we improve our use of dry processes?;Japanese Journal of Applied Physics;2019-05-30

4. Annealing performance improvement of elongated inductively coupled plasma torch and its application to recovery of plasma-induced Si substrate damage;Japanese Journal of Applied Physics;2014-01-01

5. Low-temperature crystallization of amorphous silicon and amorphous germanium by soft X-ray irradiation;Thin Solid Films;2013-05

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP