Investigations of the sheath in a dual-frequency capacitively coupled rf discharge by optically trapped microparticles
Author:
Affiliation:
1. Institute for Experimental and Applied Physics, University of Kiel, Leibnizstr. 19, 24108 Kiel, Germany
Publisher
AIP Publishing
Subject
Condensed Matter Physics
Link
https://aip.scitation.org/doi/pdf/10.1063/5.0057152
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