Low-temperature crystallization of amorphous silicon and amorphous germanium by soft X-ray irradiation-Reference-Cited by-同舟云学术

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Low-temperature crystallization of amorphous silicon and amorphous germanium by soft X-ray irradiation

Published:2013-05 Issue: Volume:534 Page:334-340
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Heya Akira,Kanda Kazuhiro,Toko Kaoru,Sadoh Taizoh,Amano Sho,Matsuo Naoto,Miyamoto Shuji,Miyao Masanobu,Mochizuki Takayasu

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference38 articles.

1. XeCl Excimer Laser Annealing Used to Fabricate Poly-Si TFT's

2. Study of Crystal Growth Mechanism for Poly-Si Film Prepared by Excimer Laser Annealing

3. Electrical properties for poly-Ge films fabricated by pulsed laser annealing

4. Thin-Film Transistors with Polycrystalline Silicon Films Prepared by Two-Step Rapid Thermal Annealing

5. Rapid Thermal Annealing Technique for Polycrystalline Silicon Thin-Film Transistors

Cited by 15 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Etching Mechanism of Si-rich SiO<sub>x</sub> Film by Atomic Hydrogen Annealing;Journal of Photopolymer Science and Technology;2024-06-25

2. Effects of Ge and Ni catalytic underlayers to nanographene synthesis from pentacene-based film via soft X-ray irradiation;Japanese Journal of Applied Physics;2022-02-23

3. Performance of BL07A at NewSUBARU with installation of a new multi-layered-mirror monochromator;Journal of Synchrotron Radiation;2021-02-11

4. Graphene synthesis from pentacene by soft X-ray irradiation;Thin Solid Films;2020-11

5. Effects of surface oxidation on the crystallization characteristics of Ge-rich Ge-Sb-Te alloys thin films;Applied Surface Science;2020-07

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