Quantum Chemical Study on Decomposition and Polymer Deposition in Perfluorocarbon Plasmas: Molecular Orbital Calculations of Excited States of Perfluorocarbons-Reference-Cited by-同舟云学术

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Quantum Chemical Study on Decomposition and Polymer Deposition in Perfluorocarbon Plasmas: Molecular Orbital Calculations of Excited States of Perfluorocarbons

Published:2001-02-15 Issue:Part 1, No. 2A Volume:40 Page:847-854
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Nakamura Toshihiro,Motomura Hideki,Tachibana Kunihide

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Cited by 14 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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2. Dissociative electron attachment to c-C4F8 molecules and clusters;The European Physical Journal D;2023-04

3. Science-based, data-driven developments in plasma processing for material synthesis and device-integration technologies;Japanese Journal of Applied Physics;2022-11-30

4. A DFT Study on the Direct CF2 Fragmentation Mechanisms of 1,3-C4F6 and 1,3-C4F6+ in Plasma;Plasma Chemistry and Plasma Processing;2022-10-06

5. Dissociation channels of c-C₄F₈ to C₂F₄ in reactive plasma;Japanese Journal of Applied Physics;2022-10-01

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