Fabrication of Fully Relaxed SiGe Layers with High Ge Concentration on Silicon-on-Insulator Wafers by Rapid Melt Growth
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,General Engineering
Link
http://stacks.iop.org/1882-0786/3/i=10/a=105501/pdf
Reference18 articles.
1. Strained Si, SiGe, and Ge channels for high-mobility metal-oxide-semiconductor field-effect transistors
2. SiGe-on-insulator prepared by wafer bonding and layer transfer for high-performance field-effect transistors
3. A Novel Fabrication Technique of Ultrathin and Relaxed SiGe Buffer Layers with High Ge Fraction for Sub-100 nm Strained Silicon-on-Insulator MOSFETs
4. Characterization of 7-nm-thick strained Ge-on-insulator layer fabricated by Ge-condensation technique
5. Characterization of strained Si wafers by X-ray diffraction techniques
Cited by 12 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Design and Optimization of InAs Waveguide- Integrated Photodetectors on Silicon via Heteroepitaxial Integration for Mid- Infrared Silicon Photonics;IEEE Photonics Journal;2024-10
2. Heteroepitaxial growth of CaGe2 films on high-resistivity Si(111) substrates and its application for germanane synthesizing;Materials Science in Semiconductor Processing;2023-07
3. Synthesis of Si–Ge Nanosheets and Their Dispersion of Organic Solvents with Focus on the Hansen Solubility Parameters;ACS Omega;2022-05-23
4. Fabrication, structural and optical properties of a virtual GeSi template by Ge filling the porous Si prepared by EC etching;Japanese Journal of Applied Physics;2020-04-23
5. Synthesis of Ge1−xSnx Alloy Thin Films by Rapid Thermal Annealing of Sputtered Ge/Sn/Ge Layers on Si Substrates;Materials;2018-11-12
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3