A Boundary Layer Model for the MOCVD Process in a Vertical Cylinder Reactor-Reference-Cited by-同舟云学术

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A Boundary Layer Model for the MOCVD Process in a Vertical Cylinder Reactor

Published:1987-09-20 Issue:Part 1, No. 9 Volume:26 Page:1416-1421
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Shibata Noriyoshi,Zembutsu Sakae

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

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