Tunable Optical Microscanner Driven by Piezoelectric Actuator
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Reference13 articles.
1. Resonant micro-mirror excited by a thin-film piezoelectric actuator for fast optical beam scanning
2. High-Speed Optical Microscanner Driven with Resonation of Lam Waves Using Pb(Zr,Ti)O3Thick Films Formed by Aerosol Deposition
3. Microelectromechanical flexure PZT actuated optical scanner: static and resonance behavior
4. PIEZOELECTRIC 2D-OPTICAL MICRO SCANNERS WITH PZT THICK FILMS
5. Application of sol–gel deposited thin PZT film for actuation of 1D and 2D scanners
Cited by 12 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. MEMS-tunable dielectric metasurface lens using thin-film PZT for large displacements at low voltages;Optics Letters;2022-02-17
2. Piezoelectric Actuators and Motors: Materials, Designs, and Applications;Advanced Materials Technologies;2019-11-27
3. Soft-rubber-packaged Pb(Zr,Ti)O3MEMS touch sensors for human–machine interface applications;Japanese Journal of Applied Physics;2017-03-13
4. Simulation and fabrication of a MEMS optical scanner device considering deformation caused by internal stress;Japanese Journal of Applied Physics;2016-09-15
5. Study on Homogeneous Wafer Level Dielectric Film Preparation Using Chemical Solution Deposition Method;Japanese Journal of Applied Physics;2013-06-01
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3