Time-Dependent Airborne Organic Contamination on Silicon Wafer Surface Stored in a Plastic Box-Reference-Cited by-同舟云学术

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Time-Dependent Airborne Organic Contamination on Silicon Wafer Surface Stored in a Plastic Box

Published:2003-04-15 Issue:Part 1, No. 4A Volume:42 Page:1575-1580
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Habuka Hitoshi,Shimazaki Yohei,Okamura Shigeru,Sugimoto Fumitoshi,Takeuchi Takashi,Aihara Masahiko,Shimada Manabu,Okuyama Kikuo

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Link

http://stacks.iop.org/1347-4065/42/i=4R/a=1575/pdf

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