Author:
Hu Shih-Cheng,Huang Zhe-Yu,Fu Ben-Ran
Funder
Southern Taiwan Science Park Bureau
Ministry of Science and Technology of R.O.C.
Gudeng Company, R.O.C.
Subject
Industrial and Manufacturing Engineering,Energy Engineering and Power Technology
Reference28 articles.
1. R. Aggarwal, Front opening unified pod, US Patent No. US6899145B2, 2005.
2. Origin of trace organic contaminants adsorbed on the surface of silicon wafers in a manufacturing line;Park;Anal. Sci.,2002
3. Time-dependent airborne organic contamination on silicon wafer surface stored in a plastic box;Habuka;Jpn. J. Appl. Phys.,2003
4. Short time deposition kinetics of diethyl phthalate and dibutyl phthalate on a silicon wafer surface;Kang;Ind. Eng. Chem. Res.,2006
5. Mathematical modeling of the AMCs cross-contamination removal in the FOUPs: finite element formulation and application in FOUP’s decontamination;Santatriniaina;Int. J. Math. Comput. Sci. Eng.,2014
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