A comparative study of the HF sorption and outgassing ability of different Entegris FOUP platforms and materials

Author:

González-Aguirre Paola,Fontaine Hervé,Beitia Carlos,Ohlsen Jim,Lundgren Jorgen,Lee Poshin

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference14 articles.

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3. Time-Dependent Airborne Organic Contamination on Silicon Wafer Surface Stored in a Plastic Box

4. The Influence and Measurement of Airborne Molecular Contaminants in Advanced Semiconductor Processing;Ayre,2005

5. Determination of physical mechanisms contributing to the difference between drain and source resistances in short-channel MOSFETs

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