Review—Airborne Molecular Contamination: Recent Developments in the Understanding and Minimization for Advanced Semiconductor Device Manufacturing
Author:
Publisher
The Electrochemical Society
Subject
Electronic, Optical and Magnetic Materials
Link
https://iopscience.iop.org/article/10.1149/2162-8777/aba080/pdf
Reference60 articles.
1. Organic Airborne Molecular Contamination in Semiconductor Fabrication Clean Rooms
2. Effects of Organic Contaminants during Metal Oxide Semiconductor Processes
3. Adsorption behavior of two model airborne organic contaminants on wafer surfaces
4. Evaluation of Molecular Interaction between Organic Molecules Physisorbed on Silicon Native Oxide Surface in Dry and Humid Atmosphere
5. Adsorption and Desorption Rate of Multicomponent Organic Species on Silicon Wafer Surface
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