UV Nanoimprint in Pentafluoropropane at a Minimal Imprint Pressure
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Reference22 articles.
1. Mold-assisted nanolithography: A process for reliable pattern replication
2. Step and flash imprint lithography: a new approach to high-resolution patterning
3. Step and flash imprint lithography: Template surface treatment and defect analysis
4. Imprint Characteristics by Photo-Induced Solidification of Liquid Polymer
5. Imprint of sub‐25 nm vias and trenches in polymers
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3. Fluorescence imprint alignment using additive-type inclination moiré fringes;Japanese Journal of Applied Physics;2020-03-09
4. Mold Design and Process for Application of Nanoimprint Lithography to Interconnections;Journal of The Japan Institute of Electronics Packaging;2019-03-01
5. Nanoimprint Lithography for Nanomanufacturing;Comprehensive Nanoscience and Nanotechnology;2019
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