Plasma-Induced Deterioration of Mechanical Characteristics of Microcantilever-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Plasma-Induced Deterioration of Mechanical Characteristics of Microcantilever

Published:2010-04-20 Issue:4 Volume:49 Page:04DL20
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Tomura Maju,Huang Chi-Hsien,Yoshida Yusuke,Ono Takahito,Yamasaki Satoshi,Samukawa Seiji

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Reference18 articles.

1. Piezoelectric MEMS sensors: state-of-the-art and perspectives

2. Active Vibration Control and Isolation for Micromachined Devices

3. From MEMS to nanomachine

4. Smooth and Vertical Profile Dry Etching of Si Using XeF2Plasma

5. Charge build‐up in Si‐processing plasma caused by electron shading effect

Cited by 12 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Single-Component Hydrophilic Terpolymer Thin Film Systems for Imparting Surface Chemical Versatility on Various Substrates;Polymers;2023-12-21

2. Single Component Hydrophilic Terpolymer Thin Film Systems for Imparting Surface Chemical Versatility on Various Substrates;2023

3. Advanced damage-free neutral beam etching technology to texture Si wafer with honeycomb pattern for broadband light trapping in photovoltaics;Journal of Materials Science: Materials in Electronics;2021-10-04

4. Progress in performance enhancement methods for capacitive silicon resonators;Japanese Journal of Applied Physics;2017-09-29

5. Mechanical quality factor enhancement in a silicon micromechanical resonator by low-damage process using neutral beam etching technology;Journal of Micromechanics and Microengineering;2014-07-04

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3