Progress in performance enhancement methods for capacitive silicon resonators
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Link
http://stacks.iop.org/1347-4065/56/i=11/a=110101/pdf
Reference53 articles.
1. Mass sensing with resonating ultra-thin silicon beams detected by a double-beam laser Doppler vibrometer
2. Mass detection using capacitive resonant silicon resonator employing LC resonant circuit technique
3. MEMS technology for timing and frequency control
4. MEMS for integrated timing and spectral processing
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