Visualization of the Effect of Liquid Dispensing Method during Spin Coating
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Reference18 articles.
1. Flow of a Viscous Liquid on a Rotating Disk
2. On the Flow of a Non‐Newtonian Liquid on a Rotating Disk
3. Spin coating: One‐dimensional model
4. Characteristics of resist films produced by spinning
5. A mathematical model for spin coating of polymer resists
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