A mathematical model for spin coating of polymer resists
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.334049
Reference18 articles.
1. Flow of a Viscous Liquid on a Rotating Disk
2. On the Flow of a Non‐Newtonian Liquid on a Rotating Disk
3. Flow and heat transfer in a film of viscous liquid on a rotating disk
4. Rheology and Modeling of the Spin Coating Process
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