Achievement of Green and Sustainable CVD Through Process, Equipment and Systematic Optimization in Semiconductor Fabrication-Reference-Cited by-同舟云学术

Achievement of Green and Sustainable CVD Through Process, Equipment and Systematic Optimization in Semiconductor Fabrication

Published:2024-04-05 Issue:4 Volume:11 Page:1295-1316
ISSN:2288-6206
Container-title:International Journal of Precision Engineering and Manufacturing-Green Technology
language:en
Short-container-title:Int. J. of Precis. Eng. and Manuf.-Green Tech.

Author:

Baek Song Yi^ORCID,Park Jingyu,Koh Taeyoung,Kim Dohyung,Woo Jewoung,Jung Jinwoo,Park Se Jun,Lee Changsoo,Choi Chulhwan

Publisher

Springer Science and Business Media LLC

Link

https://link.springer.com/content/pdf/10.1007/s40684-024-00606-y.pdf

Reference120 articles.

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5. TSMC Reports Fourth Quarter EPS of NT$11.41. (2023). http://pr.tsmc.com/english/news/2992. Accessed 12 Jan 2023

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1. Correction: Achievement of Green and Sustainable CVD Through Process, Equipment and Systematic Optimization in Semiconductor Fabrication;International Journal of Precision Engineering and Manufacturing-Green Technology;2024-04-18