Evaluation of Anisotropic Strain Relaxation in Strained Silicon-on-Insulator Nanostructure by Oil-Immersion Raman Spectroscopy
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Reference45 articles.
1. Measurement of in-plane and depth strain profiles in strained-Si substrates
2. High resolution grazing-incidence in-plane x-ray diffraction for measuring the strain of a Si thin layer
3. Evaluation of super-critical thickness strained-Si on insulator (sc-SSOI) substrate
4. Strain evaluation of strained-Si layers on SiGe by the nano-beam electron diffraction (NBD) method
5. Impact of strained-silicon-on-insulator (sSOI) substrate on FinFET mobility
Cited by 23 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Strain distributions in carbon-doped silicon nanowires along [110] and [100] investigated by X-ray diffraction;Japanese Journal of Applied Physics;2023-12-18
2. Stress/strain characterization in electronic packaging by micro-Raman spectroscopy: A review;Microelectronics Reliability;2021-03
3. Quantification of Ge fraction using local vibrational modes in Raman spectra of silicon germanium by oil-immersion Raman spectroscopy;Japanese Journal of Applied Physics;2020-06-12
4. The 2-axis stress component decoupling of {100} c-Si by using oblique backscattering micro-Raman spectroscopy;Science China Physics, Mechanics & Astronomy;2020-05-11
5. Stress evaluation induced by wiggling silicon nitride fine pattern using Raman spectroscopy;Japanese Journal of Applied Physics;2020-04-06
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3