Author:
Jeon Young Jin,Park Sin-Chong,Chun Soung Soon
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by
5 articles.
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1. Electron Beam Induced Damage of MOS Gate Oxide;Japanese Journal of Applied Physics;1998-03-30
2. Electron beam induced damage of silicon germanium;Microelectronic Engineering;1997-02
3. Fabrication of SiGe quantum devices by electron-beam induced damage;Superlattices and Microstructures;1997-01
4. Electron beam induced damage of silicon germanium;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1996-11
5. Temperature evolution during scanning electron beam processing of silicon;Applied Physics A Materials Science and Processing;1996-05