In situObservation of Initial Nucleation and Growth Processes in Supercritical Fluid Deposition of Copper
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Reference17 articles.
1. High-performance interconnects: an integration overview
2. Deposition of Conformal Copper and Nickel Films from Supercritical Carbon Dioxide
3. Characteristics of copper deposition in a supercritical CO2 fluid
4. Deposition of Cu and Ru Thin Films in Deep Nanotrenches/Holes Using Supercritical Carbon Dioxide
5. Deposition of Gold Films and Nanostructures from Supercritical Carbon Dioxide
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2. Conformal Bismuth Titanate Formation Using Supercritical Fluid Deposition;ECS Journal of Solid State Science and Technology;2017
3. Solubility of bis-(2,2,6,6-tetramethyl-3,5-heptanedionato)copper(II) in mixed supercritical CO2 and H2 systems for application in supercritical fluid deposition of Cu;The Journal of Supercritical Fluids;2015-10
4. Design of a Multi-Wafer Reactor for Supercritical Fluid Deposition of Cu in Mass Production: (2) Benchmarks for Single- and Multiple-Wafer Reactors;JOURNAL OF CHEMICAL ENGINEERING OF JAPAN;2014
5. Design of a Multi-Wafer Reactor for Supercritical Fluid Deposition of Cu in Mass Production: (1) Reaction Mechanism and Kinetics;JOURNAL OF CHEMICAL ENGINEERING OF JAPAN;2014
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