Affiliation:
1. AZ Electronic Materials USA Corp.
Publisher
Technical Association of Photopolymers, Japan
Subject
Materials Chemistry,Organic Chemistry,Polymers and Plastics
Reference14 articles.
1. 1. For options and limitations of true double exposure processes, see S. Lee, J. Byers, K. Jen, P. Zimmerman, B. Rice, N.J. Turro, and C.G. Willson, Proc.SPIE 6924 (2008) 69242A-1.
2. 2. H. Mukai, E. Shiobara, S. Takahashi, K. Hashimoto: Proc. SPIE, 6924, (2008) 692406; H.-W. Kim, et al., 5th Intl. Symp. on Immersion Lithography Extensions, (2008) O-DP-01
3. Shinji Tarutani, Tsubaki Hideaki, Sou Kamimura, Proc.SPIE 7273 (2009), in press;
4. Shinji Tarutani, Hideaki Tsubaki, and Shinichi Kanna: Proc. SPIE 6923, (2008) 69230F
5. 4. Y. C. Bae, et al., Proc. SPIE 7273 (2009), in press.
Cited by
5 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献