Novel Photoacid Generators for ArF Dry and Immersion Lithography: Application-Related Properties-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Novel Photoacid Generators for ArF Dry and Immersion Lithography: Application-Related Properties

Published:2007 Issue:3 Volume:20 Page:465-471
ISSN:0914-9244
Container-title:Journal of Photopolymer Science and Technology
language:en
Short-container-title:J. Photopol. Sci. Technol.

Author:

Asakura Toshikage,Yamamoto Hitoshi,Nishimae Yuichi,Ohwa Masaki

Publisher

Technical Association of Photopolymers, Japan

Subject

Materials Chemistry,Organic Chemistry,Polymers and Plastics

Link

http://www.jstage.jst.go.jp/article/photopolymer/20/3/20_3_465/_pdf

Reference9 articles.

1. 1. B. J. Lin, Proc. SPIE 4688 (2002) 11-24.

2. Novel Photoacid Generators.

3. 3. H. Yamato, T. Asakura, A. Matsumoto and M. Ohwa, Proc. SPIE 4690 (2002) 799-808.

4. 4. T. Asakura, H. Yamato, T. Hintermann and M. Ohwa, Proc. SPIE 5753 (2005) 140-148.

5. 5. H. Yamato, T. Asakura, and M. Ohwa, Proc. SPIE 6153 (2006) 61530F/1-61530F/9.

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Oxime Type Photoacid Generators Having Adamantyl and Superstrong Acid Precursor Group;Journal of Photopolymer Science and Technology;2018-06-25

2. Oxime Type Photoacid Generators Having Adamantyl Group;Journal of Photopolymer Science and Technology;2015

3. Direct Observation of Intermediates in Sensitization Reaction of Anthracenes and Oxime Type Photoacid Generator in Polymer Matrix;Journal of Photopolymer Science and Technology;2009

4. Sensitization Reaction of Oxime Type Photoacid Generator;Journal of Photopolymer Science and Technology;2008

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP