EUV Resist Chemical Reaction Analysis using SR

Author:

Watanabe Takeo,Emura Kazuya,Shiono Daiju,Haruyama Yuichi,Muramatsu Yasuji,Ohmori Katsumi,Sato Kazufumi,Harada Tetsuo,Kinoshita Hiroo

Publisher

Technical Association of Photopolymers, Japan

Subject

Materials Chemistry,Organic Chemistry,Polymers and Plastics

Reference32 articles.

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3. 3. H. Ito, C. G. Willson, and J. M. J. Frechet, Digest of Tech. Papers 1982 Symp. VLSI Tech., (1982) 86.

4. 4. H. Ito and C. G. Willson, Polym. Eng. Sci., 23 (1983) 1012.

5. 5. H. Ito, G. Breyta, D. Hofer, R. Sooriyakumaran, K. Petrillo, and D. Seeger, J. Photopolym. Sci. Technol., 7 (1994) 433.

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