Roughness Power Spectral Density as a Function of Aerial Image and Basic Process / Resist Parameters-Reference-Cited by-同舟云学术

Roughness Power Spectral Density as a Function of Aerial Image and Basic Process / Resist Parameters

Published:2020-01-31 Issue:6 Volume:32 Page:779-790
ISSN:0914-9244
Container-title:Journal of Photopolymer Science and Technology
language:en
Short-container-title:J. Photopol. Sci. Technol.

Author:

Cutler Charlotte¹,Lee Choong-Bong¹,Thackeray James W.¹,Trefonas Peter¹,Nelson John¹,DeSisto Jason¹,Li Mingqi¹,Rena Rochelle¹,Mack Chris²

Affiliation:

1. Dupont Electronics and Imaging

2. Fractilia, LLC

Publisher

Technical Association of Photopolymers, Japan

Subject

Materials Chemistry,Organic Chemistry,Polymers and Plastics

Link

https://www.jstage.jst.go.jp/article/photopolymer/32/6/32_779/_pdf

Reference7 articles.

1. 1. C. A. Mack and B. D. Bunday, Proc. SPIE, 10145 (2017) 101451R.

2. 2. C. Mack, J. Nicro/Nanolith. MEMS MOEMS, 11 (2012) 043007.

3. 3. C. A. Mack, J. Nicro/Nanolith. MEMS MOEMS, 17 (2018) 041006.

4. 4. C. Cutler, J. W. Thackeray, J. DeSisto, J. Nelson, C.-B. Lee, M. Li, E. Aqad, X. Hou, T. Marangoni, J. Kaitz, R. Rena, and C. Mack, Proc. SPIE, 10587 (2018) 1058707.

5. 5. C. Cutler, C.-B. Lee, J. W. Thackeray, C. Mack, J. Nelson, J. DeSisto, M. Li, E. Aqad, X. Hou, T. Marangoni, J. Kaitz, and R. Rena, J. Photopolym. Sci. Technol., 31 (2018) 679.

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