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Time-resolved Analysis of Resist Stripping Phenomenon Using Laser Irradiation

  • Published:2018-06-25 Issue:3 Volume:31 Page:413-418
  • ISSN:0914-9244
  • Container-title:Journal of Photopolymer Science and Technology
  • language:en
  • Short-container-title:J. Photopol. Sci. Technol.

Author:

Kamimura Tomosumi1,Umeda Yuji1,Kuramae Hiroyuki2,Nuno Kosuke1,Nakamura Ryosuke3,Horibe Hideo4

Affiliation:

1. Department of Electronics, Information and Communication Engineering, Osaka Institute of Technology

2. Department of Robotics, Osaka Institute of Technology

3. Science & Technology Entrepreneurship Laboratory, Osaka University

4. Department of Applied Chemistry and Bioengineering, Graduate School of Engineering, Osaka City University

Publisher

Technical Association of Photopolymers, Japan

Subject

Materials Chemistry,Organic Chemistry,Polymers and Plastics

Reference20 articles.

1. 1. M. Strobel, C. S. Lyons, and K. L. Mittal, VSP, Utrecht, The Netherlands, 1994.

2. 2. E. M. Liston, J. J. Pireaux, P. Bertrand, and J. L. Bredas, Eds., Institute of Physics, Belgium, (1991) 429.

3. 3. H. Morinaga, M. Suyama, and T. Ohmi, J. Electrochem. Soc., 141 (1994) 2834.

4. 4. H. Morinaga, T. Futatsuki, T. Ohmi, E. Fuchita, M. Oda, and C. Hayashi, J. Electrochem. Soc., 142 (1995) 966.

5. 5. M. N. Kawaguchi, J. S. Papanu, B. Su, M. Castle, and A. Al-Bayati, J. Vac. Sci. Technol. B, 24 (2006) 657.

Cited by 3 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Resist Removal Using Laser Irradiation Combined with Ozone Water Treatment;Journal of Photopolymer Science and Technology;2023-06-15

2. Nodule Deformation on Cleaning of PVA Roller Brushes and its Relation to Cross-contamination;Journal of Photopolymer Science and Technology;2021-06-11

3. A Comparison of Removal Phenomena in Photoresist Materials Using Laser Irradiation;Journal of Photopolymer Science and Technology;2019-06-24
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