Nodule Deformation on Cleaning of PVA Roller Brushes and its Relation to Cross-contamination
Author:
Affiliation:
1. Graduate School of Integrated Science and Technology, Shizuoka University
2. Department of Mechanical Engineering, Shizuoka University
3. Ebara Corporation
Publisher
Technical Association of Photopolymers, Japan
Subject
Materials Chemistry,Organic Chemistry,Polymers and Plastics
Link
https://www.jstage.jst.go.jp/article/photopolymer/34/5/34_505/_pdf
Reference19 articles.
1. 1. T. Hattori, ECS Trans., 25 (2009) 3.
2. 2. A. A. Busnaina, I. I. Kashkoush, and G. W. Gale, J. Electrochem. Soc., 142 (1995) 2812.
3. 3. W. Kim, T. H. Kim, J. Choi, and H. Y. Kim, Appl. Phys. Lett. 94 (2009) 081908.
4. 4. S. Brems, M. Hauptmann, E. Camerotto, A. Pacco, A., T. G. Kim, X. Xu, K. Wostyn, P. Martens and S. De Gendt, ECS J. Solid State Sci. Technol., 3 (2013) N3010.
5. 5. I. Kanno, N. Yokoi, and K. Sato, ECS Proc., 35 (1998) 54.
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