Photoresist and Thin Metal Film Removal by Steam and Water Mixed Spray
Author:
Affiliation:
1. Department of Mechanical Engineering, Faculty of Engineering, Shizuoka University,
2. Division of Mechanical and Space Engineering, Faculty of Engineering, Hokkaido University
Publisher
Technical Association of Photopolymers, Japan
Subject
Materials Chemistry,Organic Chemistry,Polymers and Plastics
Link
https://www.jstage.jst.go.jp/article/photopolymer/28/2/28_289/_pdf
Reference8 articles.
1. 1. M. Watanabe, T. Sanada, A. Hayashida, Y. Isago, Solid State Phenom., 145-146 (2009) 43.
2. 2. T. Sanada, M. Watanabe, A. Hayashida, Y. Isago, Solid State Phenom., 145-146 (2009) 273.
3. 3. T. Sanada, A. Hayashida, M. Shirota, M. Yamase, M. Watanbe, Fluid Dyn. Res., 40 (2008) 627.
4. 4. A. Hayashida, A. Seki, T. Mashiko, T. Sanada, M. Watanabe, ECS Trans., 25 (2009) 249.
5. 5. T. Sanada, K. Hashimoto, A. Hayashida, M. Watanabe, ECS Trans., 41 (2011) 59.
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