Dependence on Resist Stripping Efficiency to Irradiating Beam Size in Advanced Laser Resist Stripping Method
Author:
Affiliation:
1. Department of Electronics, Information and Communication Engineering, Osaka Institute of Technology
2. Department of Applied Chemistry and Bioengineering, Graduate School of Engineering, Osaka City University
Publisher
Technical Association of Photopolymers, Japan
Subject
Materials Chemistry,Organic Chemistry,Polymers and Plastics
Link
https://www.jstage.jst.go.jp/article/photopolymer/28/2/28_307/_pdf
Reference16 articles.
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3. 3. M. N. Kawaguchi, J. S. Papanu, B. Su, M. Castle, and A. Al-Bayati, J. Vac. Sci. Technol. B., 24(2) (2006) 657-663.
4. 4. M. Yamamoto, T. Maruoka, A. Kono, H. Horibe, and H. Umemoto, Jpn. J. Appl. Phys., 49 (2010) 016701.
5. 5. H. Morinaga, M. Suyama, and T. Ohmi, J. Electrochem. Soc., 141(10) (1994) 2834-2841.
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