Fabrication of Sub-10 nm Metal Wire Circuits using Directed Self-Assembly of Block Copolymers
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Published:2016
Issue:5
Volume:29
Page:647-652
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ISSN:0914-9244
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Container-title:Journal of Photopolymer Science and Technology
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language:en
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Short-container-title:J. Photopol. Sci. Technol.
Author:
Azuma Tsukasa1, Seino Yuriko1, Sato Hironobu1, Kasahara Yusuke1, Kobayashi Katsutoshi1, Kubota Hitoshi1, Kanai Hideki1, Kodera Katsuyoshi1, Kihara Naoko1, Kawamonzen Yoshiaki1, Minegishi Shinya1, Miyagi Ken1, Yamano Hitoshi1, Tobana Toshikatsu1, Shiraishi Masayuki1, Nomura Satoshi1
Affiliation:
1. DSA Research Department, EUVL Infrastructure Development Center, Inc. (EIDEC)
Publisher
Technical Association of Photopolymers, Japan
Subject
Materials Chemistry,Organic Chemistry,Polymers and Plastics
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