Direct Self-Assembly for Non-Periodic Designs
Author:
Affiliation:
1. Dept. of Chemical Engineering, Graduate School of Engineering, Kyoto Univ.
2. Center for the Promotion of Interdisciplinary Education and Research, Kyoto Univ.
3. Memory Technology Research & Development Center, Toshiba Corporation
Publisher
Technical Association of Photopolymers, Japan
Subject
Materials Chemistry,Organic Chemistry,Polymers and Plastics
Link
https://www.jstage.jst.go.jp/article/photopolymer/29/5/29_709/_pdf
Reference14 articles.
1. 1. R. Gronheid and P. F. Nealey, "Directed Self-assembly of Block Co-polymers for Nano-manufacturing," Elsevier, Oxford, 2015.
2. 2. H. Pathangi, M. Stokhof, W. Knaepen, V. Vaid, A. Mallik, B. T. Chan, N. Vandenbroeck, J. W. Maes, R. Gronheid, Proc. SPIE, 9779 (2016) 97791Z.
3. 3. M. Neisser and S. Wurm, Adv. Opt. Technol., 4 (2015) 235.
4. 4. H. Tsai, J. W. Pitera, H. Miyazoe, S. Bangsaruntip, S. U. Engelmann, C.-C. Liu, J. Y. Cheng, J. J. Bucchignano, D. P. Klaus, E. A. Joseph, D. P. Sanders, M. E. Colburn, M. A. Guillorn, ACS Nano, 5 (2014) 5227.
5. 5. S. Sayan, B. T. Chan, R. Gronheid, F. V. Roey, M.-S. Kim, L. Williamson, and P. F. Nealey, Proc. SPIE, 9051 (2014) 90510M.
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