Surface Treatment Effect on the Grain Size and Surface Roughness of as‐Deposited LPCVD Polysilicon Films-Reference-Cited by-同舟云学术

Surface Treatment Effect on the Grain Size and Surface Roughness of as‐Deposited LPCVD Polysilicon Films

Published:1993-01-01 Issue:1 Volume:140 Page:282-288
ISSN:0013-4651
Container-title:Journal of The Electrochemical Society
language:
Short-container-title:J. Electrochem. Soc.

Author:

Voutsas Apostolos T.¹²,Hatalis Miltiadis K.¹²

Affiliation:

1. Department of Chemical Engineering, Lehigh University, Bethlehem, Pennsylvania, 18015

2. Department of Electrical Engineering and Computer Science, Sherman Fairchild Center for Solid State Studies, Lehigh University, Bethlehem, Pennsylvania, 18015

Publisher

The Electrochemical Society

Subject

Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials

Link

https://iopscience.iop.org/article/10.1149/1.2056103/pdf

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